EddyCus® TF Series (Thin-Film) comprises a set of devices for real-time testing of the sheet resistance of thin films utilizing contact free eddy current testing technology. The systems can also be used for characterization of sensitive films and hidden or encapsulated layers on glass, wafers, or foils. Applications include:
EddyCus® TF lab devices are sheet resistance and thickness measuring desktop systems designed for rapid non-contact thin film characterization in laboratories, R&D centers, and quality assurance departments in factories and fabs.
The EddyCus® TF inline series comprises integration kits for coating equipment enabling contactless inline sheet resistance monitoring and process controlling for deposition processes of conductive thin films.
The EddyCus® TF map series is designed for rapid mapping of sheet resistance, assessment of layer homogeneity, and detection of local effects and defects. Systems are available as free standing test stands or desktop devices.