Applications
- Architectural glass
- Touch screens and flat monitors
- OLED applications
- Smart-glass applications
- Transparent antistatic foils
- Photovoltaic cells
- De-icing and heating applications
- Batteries
Sheet Resistance Measurement
The EddyCus® TF lab series testing devices are designed for single-point contact-free real-time thickness and sheet resistance measurement of low and highly conductive thin films on glass, wafers, plastics, or foils. The devices are also applicable for real-time film thickness measurements of conductive materials such as metal foils and sheets.
| Transparent Thin Films | Metallic Thin Films |
|---|---|
| TCO (ITO, AZO, FTO) | Aluminum |
| Graphene | Molybdenum |
| CNT (Carbon Nano Tubes) | Zinc |
| Metal Nano Wires | Silver |
| and many more | and many more |
Software & Handling
EddyCus® TF lab control is a user-friendly software for sheet resistance measurement, data tracking, and data analysis. SURAGUS offers touch screen software that is optimized with a notebook or tablet PC to provide a system with high usability.
- Real-time measurment of sheet resistance or thickness
- Mapping module for guided manual mapping
- Collection of data sets, savings, and data export function
- Software instantly shows sheet resistance or according layer or substrate thickness
Single Point Devices
EddyCus® TF lab 2020 Series
EddyCus® TF lab 2020SR
EddyCus® TF lab 2020SR is a single-point sheet resistance and layer thickness measuring device for smaller samples in laboratory applications.
- Sheet resistance monitoring [Ohm/sq]
- Thin film thickness monitoring [nm]
- Film thickness monitoring of low and high conductive substrates [µm]
Single Point Sheet Resistance Tester TF lab 2020 SR PDF 875.9 KB
EddyCus® TF lab 4040 Series
EddyCus® TF lab 4040SR
EddyCus® TF lab 4040SR is a single-point measuring device for quick non-contact film characterization of sheet resistance and layer thickness of larger samples in laboratories, R&D centers, and quality assurance departments of manufacturing firms.
- Sheet resistance measurement of multilayer systems on request (feasibility study)
- Layer and substrate thickness monitoring [nm]
Performance & Setup
| EddyCus TF lab 2020SR | EddyCus TF lab 4040SR | |
|---|---|---|
| Sheet resistance measurement | Eddy current sensor | |
| Substrate thickness measurement | On request | |
| Substrate area | 200 x 200 mm² | 400 x 400 mm² |
| Max. sample thickness (influences gap size) |
up to 14mm (20 mm possible) (Defined by the thickest sample/application) |
1 / 2 / 5 / 10 / 18 mm (50 mm possible) (Defined by the thickest sample/application) |
| Sheet resistance range | 0.0001 – 10 Ohm/sq; 2 % accuracy & 1 % repeatability 10 – 100 Ohm/sq; 3 % accuracy & 1.5 % repeatability 100 – 500 Ohm/sq; 4 % accuracy & 2 % repeatability 100 – 1,000 Ohm/sq; 5 % accuracy & 2.5 % repeatability 1,000 – 3,000 Ohm/sq; 8 % accuracy & 4 % repeatability |
|
| Thickness measurement of thin films | In accordance with sheet resistance | |
| Device sizes (h/w/d) | 445 / 290 / 140 mm | 660 / 760 / 310 mm |
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